Large deflection micromechanical scanning mirrors for...

IEEE Journal of Selected Topics in Quantum Electronics 2000 Vol. 6; Iss. 5

Large deflection micromechanical scanning mirrors for linear scans and pattern generation

Schenk, H., Durr, P., Haase, T., Kunze, D., Sobe, U., Lakner, H., Kuck, H.
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Volume:
6
Year:
2000
Language:
english
DOI:
10.1109/2944.892609
File:
PDF, 427 KB
english, 2000
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