A 1.5-V-supplied CMOS ASIC for the actuation of an electrostatic micromotor
Favrat, P., Paratte, L., Ballan, H., Declercq, M.J., de Rooij, N.F.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/3516.622967
File:
PDF, 216 KB
english, 1997