Silicon Surface Passivation by Thin Thermal Oxide/PECVD...

IEEE Journal of Photovoltaics 2011 Vol. 1; Iss. 2

Silicon Surface Passivation by Thin Thermal Oxide/PECVD Layer Stack Systems

Mack, S., Wolf, A., Brosinsky, C., Schmeisser, S., Kimmerle, A., Saint-Cast, P., Hofmann, M., Biro, D.
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Volume:
1
Year:
2011
Language:
english
DOI:
10.1109/jphotov.2011.2173299
File:
PDF, 959 KB
english, 2011
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