InGaAsP-InP nanoscale waveguide-coupled microring lasers with submilliampere threshold current using Cl2--N2-based high-density plasma etching
Seoijin Park, Seong-Soo Kim, Liwei Wang, Seng-Tiong HoVolume:
41
Year:
2005
Language:
english
DOI:
10.1109/jqe.2004.842311
File:
PDF, 740 KB
english, 2005