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Capacitively Coupled Non-Contact Probing Circuits for Membrane-Based Wafer-Level Simultaneous Testing
Daito, M., Nakata, Y., Sasaki, S., Gomyo, H., Kusamitsu, H., Komoto, Y., Iizuka, K., Ikeuchi, K., Gil Su Kim, Takamiya, M., Sakurai, T.Volume:
46
Year:
2011
Language:
english
DOI:
10.1109/jssc.2011.2160790
File:
PDF, 2.62 MB
english, 2011