Improved microwave performance of spiral inductors on Si substrates by chemically anodizing a porous silicon layer
Ming-Jie Yu, Yi-Jen Chan, Li-Hong Laih, Jyh-Wong HongVolume:
26
Year:
2000
Language:
english
Pages:
3
DOI:
10.1002/1098-2760(20000820)26:43.0.co;2-7
File:
PDF, 114 KB
english, 2000