Detailed Placement for Enhanced Control of Resist and Etch...

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 2007 Vol. 26; Iss. 12

Detailed Placement for Enhanced Control of Resist and Etch CDs

Gupta, P., Kahng, A.B., Park Chul-Hong
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Volume:
26
Year:
2007
Language:
english
DOI:
10.1109/tcad.2007.906998
File:
PDF, 1.20 MB
english, 2007
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