Timing Yield-Aware Color Reassignment and Detailed...

IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 2010 Vol. 29; Iss. 8

Timing Yield-Aware Color Reassignment and Detailed Placement Perturbation for Bimodal CD Distribution in Double Patterning Lithography

Gupta, M., Kwangok Jeong, Kahng, A.B.
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Volume:
29
Year:
2010
Language:
english
DOI:
10.1109/tcad.2010.2049041
File:
PDF, 3.61 MB
english, 2010
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