A Neural-Network Approach for Defect Recognition in TFT-LCD...

IEEE Transactions on Electronics Packaging Manufacturing 2009 Vol. 32; Iss. 1

A Neural-Network Approach for Defect Recognition in TFT-LCD Photolithography Process

Li-Fei Chen, Chao-Ton Su, Meng-Heng Chen
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Volume:
32
Year:
2009
Language:
english
DOI:
10.1109/tepm.2008.926117
File:
PDF, 1.34 MB
english, 2009
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