![](/img/cover-not-exists.png)
A Neural-Network Approach for Defect Recognition in TFT-LCD Photolithography Process
Li-Fei Chen, Chao-Ton Su, Meng-Heng ChenVolume:
32
Year:
2009
Language:
english
DOI:
10.1109/tepm.2008.926117
File:
PDF, 1.34 MB
english, 2009