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High-Dynamics Low-Cost Flow Control With Solenoid Actuator for Ultrahigh Purity Applications
Warberger, B., Feller, J., Guntermann, C., Nussbaumer, T., Kolar, J.W.Volume:
47
Year:
2011
Language:
english
DOI:
10.1109/tia.2011.2161853
File:
PDF, 881 KB
english, 2011