Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages
Heertjes, M.F., Schuurbiers, X.G.P., Nijmeijer, H.Volume:
56
Year:
2009
Language:
english
DOI:
10.1109/tie.2009.2012420
File:
PDF, 916 KB
english, 2009