A MEMS Doubly Decoupled Gyroscope With Wide Driving Frequency Range
Chun-Wei Tsai, Kai-hsin Chen, Ching-Kai Shen, Jui-che TsaiVolume:
59
Year:
2012
Language:
english
DOI:
10.1109/tie.2011.2177612
File:
PDF, 1.31 MB
english, 2012