Large travel ultra precision x-y-&thetas; motion control of a magnetic-suspension stage
Shih-Kang Kuo, Ximin Shan, Chia-Hsiang MenqVolume:
8
Year:
2003
Language:
english
DOI:
10.1109/tmech.2003.816825
File:
PDF, 475 KB
english, 2003