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Uncoupling micromachined-based piezoelectric accelerometer performance from a sensor structure transfer function
Yu-Hsiang Hsu, Chih-Kung Lee, Long-Sun Huang, Chih-Cheng Chu, Ta-Shun ChuVolume:
10
Year:
2005
Language:
english
DOI:
10.1109/tmech.2005.848301
File:
PDF, 180 KB
english, 2005