DC Breakdown of C3F8/Ar and C3F8/N2 Mixtures

IEEE Transactions on Plasma Science 1984 Vol. 12; Iss. 3

DC Breakdown of C3F8/Ar and C3F8/N2 Mixtures

Kunhardt, E. E., Sutton, C., Danner, D.
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Volume:
12
Year:
1984
Language:
english
DOI:
10.1109/tps.1984.4316325
File:
PDF, 430 KB
english, 1984
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