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Four Point Probe Structures With Buried and Surface Electrodes for the Electrical Characterization of Ultrathin Conducting Films
Groenland, A.W., Wolters, R.A.M., Kovalgin, A.Y., Schmitz, J.Volume:
25
Year:
2012
Language:
english
DOI:
10.1109/tsm.2011.2181674
File:
PDF, 6.77 MB
english, 2012