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Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net
Chung-Hsien Kuo, Chao-Hsiung Wang, Kuo-Wei HuangVolume:
33
Year:
2003
Language:
english
DOI:
10.1109/tsmca.2003.817395
File:
PDF, 1.54 MB
english, 2003