Novel analog pulse-width-modulated 15-μm SiGe micromirrors
Roel Beernaert, Aykut Avci, Jelle De Smet, Herbert De Smet, Jeroen De Coster, Simone Severi, Ann WitvrouwVolume:
18
Year:
2010
Language:
english
DOI:
10.1889/jsid18.10.855
File:
PDF, 2.66 MB
english, 2010