![](/img/cover-not-exists.png)
Nanofabrication || Chemical Mechanical Polish for Nanotechnology
Stepanova, Maria, Dew, StevenVolume:
10.1007/97
Year:
2012
Language:
english
DOI:
10.1007/978-3-7091-0424-8_10
File:
PDF, 1.38 MB
english, 2012