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Effect of Particle Interaction on Agglomeration of Silica-Based CMP Slurries
Sorooshian, A., Ashwani, R., Choi, H.K., Moinpour, M., Oehler, A., Tregub, A.Volume:
816
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-816-k4.9
Date:
January, 2004
File:
PDF, 82 KB
english, 2004