![](/img/cover-not-exists.png)
[IEEE 2004 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (9-10 Sept. 2004)] 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) - Study of junction leakage caused by cobalt silicide defects
Wang, L., Bridgman, B., Klein, G., Liying Wu,, Darilek, J.Year:
2004
Language:
english
DOI:
10.1109/smtw.2004.1393765
File:
PDF, 178 KB
english, 2004