[IEEE 2004 Semiconductor Manufacturing Technology Workshop...

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[IEEE 2004 Semiconductor Manufacturing Technology Workshop - Hsinchu, Taiwan (9-10 Sept. 2004)] 2004 Semiconductor Manufacturing Technology Workshop Proceedings (IEEE Cat. No.04EX846) - Study of junction leakage caused by cobalt silicide defects

Wang, L., Bridgman, B., Klein, G., Liying Wu,, Darilek, J.
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Year:
2004
Language:
english
DOI:
10.1109/smtw.2004.1393765
File:
PDF, 178 KB
english, 2004
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