[IEEE 32nd European Solid-State Device Research Conference - Firenze, Italy (2002.9.24-2002.9.26)] 32nd European Solid-State Device Research Conference - Impact of Source/drain Implants on Threshold Voltage Matching in Deep Sub-micron CMOS Technologies
Dubois, J., Knol, J., Bolt, M., Tuinhout, H., Schmitz, J., Stolk, P.Year:
2002
Language:
english
DOI:
10.1109/essderc.2002.194883
File:
PDF, 145 KB
english, 2002