[IEEE 2011 International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam, Netherlands (2011.04.4-2011.04.7)] 2011 IEEE ICMTS International Conference on Microelectronic Test Structures - Evaluation of MOSFET C-V curve variation using test structure for charge-based capacitance measurement
Tsuji, Katsuhiro, Terada, Kazuo, Kikuchi, Ryota, Tsunomura, Takaaki, Nishida, Akio, Mogami, TohruYear:
2011
Language:
english
DOI:
10.1109/icmts.2011.5976852
File:
PDF, 376 KB
english, 2011