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[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Large Qxf product for HBAR using Smart Cut ™ transfer of LiNbO3 thin layers onto LiNbO3 substrate
Pijolat, M., Reinhardt, A., Defay, E., Deguet, C., Mercier, D., Aid, M., Moulet, J.S., Ghyselen, B., Gachon, D., Ballandras, S.Year:
2008
Language:
english
DOI:
10.1109/ultsym.2008.0049
File:
PDF, 2.22 MB
english, 2008