ION BEAM LITHOGRAPHY AND NANOFABRICATION: A REVIEW
WATT, F., BETTIOL, A. A., VAN KAN, J. A., TEO, E. J., BREESE, M. B. H.Volume:
4
Language:
english
Journal:
International Journal of Nanoscience
DOI:
10.1142/s0219581x05003139
Date:
June, 2005
File:
PDF, 2.79 MB
english, 2005