Challenges in hardening technologies using shallow-trench...

IEEE Transactions on Nuclear Science 1998 / Dec. Vol. 45; Iss. 6

Challenges in hardening technologies using shallow-trench isolation

Shaneyfelt, M.R., Dodd, P.E., Draper, B.L., Flores, R.S.
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Volume:
45
Language:
english
Journal:
IEEE Transactions on Nuclear Science
DOI:
10.1109/23.736501
Date:
January, 1998
File:
PDF, 1.25 MB
english, 1998
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