[Computational Microelectronics] Intrinsic Point Defects,...

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[Computational Microelectronics] Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon || Halogens

Pichler, Peter
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Volume:
10.1007/97
Year:
2004
Language:
english
DOI:
10.1007/978-3-7091-0597-9_7
File:
PDF, 3.42 MB
english, 2004
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