[Computational Microelectronics] Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon || Halogens
Pichler, PeterVolume:
10.1007/97
Year:
2004
Language:
english
DOI:
10.1007/978-3-7091-0597-9_7
File:
PDF, 3.42 MB
english, 2004