Control of cathodic arc spot motion under external magnetic...

Control of cathodic arc spot motion under external magnetic field

Li, Liuhe, Zhu, Ying, He, Fushun, Dun, Dandan, Li, Fen, Chu, Paul K., Li, Jianzhang
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Volume:
91
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.10.008
Date:
May, 2013
File:
PDF, 596 KB
english, 2013
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