Control of cathodic arc spot motion under external magnetic field
Li, Liuhe, Zhu, Ying, He, Fushun, Dun, Dandan, Li, Fen, Chu, Paul K., Li, JianzhangVolume:
91
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.10.008
Date:
May, 2013
File:
PDF, 596 KB
english, 2013