Deposition of ZnO and MgZnO films by magnetron sputtering

Vacuum 2013 / 3 Vol. 89

Deposition of ZnO and MgZnO films by magnetron sputtering

Xiong, D.P., Tang, X.G., Zhao, W.R., Liu, Q.X., Wang, Y.H., Zhou, S.L.
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Volume:
89
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.05.030
Date:
March, 2013
File:
PDF, 338 KB
english, 2013
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