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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - Novel continuously shaped diffractive optical elements enable high efficiency beam shaping
Miklyaev, Yuri V., Imgrunt, Waleri, Pavelyev, Vladimir S., Kachalov, Denis G., Bizjak, Tanja, Aschke, Lutz, Lissotschenko, Vitalij N., Dusa, Mircea V., Conley, WillVolume:
7640
Year:
2010
Language:
english
DOI:
10.1117/12.846573
File:
PDF, 1.20 MB
english, 2010