Surface acoustic wave methods to determine the anisotropic...

Measurement Science and Technology 2001 / 09 Vol. 12; Iss. 9

Surface acoustic wave methods to determine the anisotropic elastic properties of thin films*

Hurley, D C, Tewary, V K, Richards, A J
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Volume:
12
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/12/9/315
Date:
September, 2001
File:
PDF, 239 KB
english, 2001
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