Structural characterization of low‐defect‐density silicon...

Journal of Applied Physics 1983 Vol. 54; Iss. 8

Structural characterization of low‐defect‐density silicon on sapphire

Carey, Kent W., Ponce, Fernando A., Amano, Jun, Aranovich, Julio
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Volume:
54
Year:
1983
Language:
english
DOI:
10.1063/1.332635
File:
PDF, 922 KB
english, 1983
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