Formation of Submicrometer Pore Arrays by Electrochemical...

Journal of The Electrochemical Society 2011 Vol. 158; Iss. 1

Formation of Submicrometer Pore Arrays by Electrochemical Etching of Silicon and Nanoimprint Lithography

Laffite, Guillaume, Roumanie, Marilyne, Gourgon, Cecile, Perret, Corinne, Boussey, Jumana, Kleimann, Pascal
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Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3514584
File:
PDF, 586 KB
english, 2011
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