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Selective Atomic Layer Deposition of Metal Oxide Thin Films on Patterned Self-Assembled Monolayers Formed by Microcontact Printing
Lee, Byoung H., Sung, Myung M.Volume:
7
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2007.018
Date:
November, 2007
File:
PDF, 602 KB
english, 2007