Hardness, intrinsic stress, and structure of the a-C and...

Diamond and Related Materials 2001 / 3 Vol. 10; Iss. 3-7

Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering

Kulikovsky, V., Bohac, P., Franc, F., Deineka, A., Vorlicek, V., Jastrabik, L.
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Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/s0925-9635(00)00525-2
Date:
March, 2001
File:
PDF, 135 KB
english, 2001
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