![](/img/cover-not-exists.png)
Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering
Kulikovsky, V., Bohac, P., Franc, F., Deineka, A., Vorlicek, V., Jastrabik, L.Volume:
10
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/s0925-9635(00)00525-2
Date:
March, 2001
File:
PDF, 135 KB
english, 2001