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A Self-Aligned Ni-InGaAs Contact Technology for InGaAs Channel n-MOSFETs
Zhang, Xingui, Ivana,, Guo, Hua Xin, Gong, Xiao, Zhou, Qian, Yeo, Yee-ChiaVolume:
159
Year:
2012
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.060205jes
File:
PDF, 425 KB
english, 2012