MEMS Thermal Flow Sensor With Smart Electronic Interface...

IEEE Sensors Journal 2012 / 12 Vol. 12; Iss. 12

MEMS Thermal Flow Sensor With Smart Electronic Interface Circuit

Dalola, S., Cerimovic, S., Kohl, F., Beigelbeck, R., Schalko, J., Ferrari, V., Marioli, D., Keplinger, F., Sauter, T.
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Volume:
12
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2012.2219619
Date:
December, 2012
File:
PDF, 1.15 MB
english, 2012
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