Temperature Dependence of Quality Factor in MEMS Resonators
Bongsang Kim, Hopcroft, M.A., Candler, R.N., Jha, C.M., Agarwal, M., Melamud, R., Chandorkar, S.A., Yama, G., Kenny, T.W.Volume:
17
Year:
2008
Language:
english
DOI:
10.1109/jmems.2008.924253
File:
PDF, 1.26 MB
english, 2008