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Simultaneous Determination of Carrier Concentration, Mobility, and Thickness of SiC Homoepilayers by Infrared Reflectance Spectroscopy
Oishi, Shingo, Hijikata, Yasuto, Yaguchi, Hiroyuki, Yoshida, SadafumiVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.45.l1226
Date:
November, 2006
File:
PDF, 148 KB
english, 2006