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[IEEE 2006 14th International Conference on Advanced Thermal Processing of Semiconductors - Kyoto (2006.10.10-2006.10.13)] 2006 14th IEEE International Conference on Advanced Thermal Processing of Semiconductors - Sub-30nm Mosfet Fabrication Technology Incorporating Precise Dopant Profile Design using Diffusion-Less High-Activation Laser Annealing
Narihiro, M., Iwamoto, T., Yamamoto, T., Ikezawa, T., Yako, K., Tanaka, M., Mineji, A., Okuda, Y., Uejima, K., Shishiguchi, S., Hane, M.Year:
2006
Language:
english
DOI:
10.1109/rtp.2006.367995
File:
PDF, 1.35 MB
english, 2006