Role of Nitrogen in the Formation of $\hbox{CN}_{x}$ Films...

IEEE Transactions on Plasma Science 2012 / 07 Vol. 40; Iss. 7

Role of Nitrogen in the Formation of $\hbox{CN}_{x}$ Films by Pulsed Laser Deposition

Wang, Zhiping, Ito, Hiroaki, Masugata, Katsumi
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Volume:
40
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2012.2197224
Date:
July, 2012
File:
PDF, 272 KB
english, 2012
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