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High-performance p-channel Schottky-barrier SOI FinFET featuring self-aligned PtSi source/drain and electrical junctions
Horng-Chih Lin, Meng-Fan Wang, Fu-Ju Hou, Hong-Nien Lin, Chia-Yu Lu, Jan-Tsai Liu, Tiao-Yuan HuangVolume:
24
Year:
2003
Language:
english
DOI:
10.1109/led.2002.807717
File:
PDF, 309 KB
english, 2003