High-performance p-channel Schottky-barrier SOI FinFET...

High-performance p-channel Schottky-barrier SOI FinFET featuring self-aligned PtSi source/drain and electrical junctions

Horng-Chih Lin, Meng-Fan Wang, Fu-Ju Hou, Hong-Nien Lin, Chia-Yu Lu, Jan-Tsai Liu, Tiao-Yuan Huang

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Volume:

Year:

2003

Language:

english

DOI:

10.1109/led.2002.807717

File:

PDF, 309 KB

english, 2003

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