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The origin of contrast in the imaging of doped areas in silicon by slow electrons
Frank, Ludek, Mullerova, Ilona, Valdaitsev, Dimitrii A., Gloskovskii, Andrei, Nepijko, Sergei A., Elmers, Hans-Joachim, Schonhense, GerdVolume:
100
Year:
2006
Language:
english
DOI:
10.1063/1.2364044
File:
PDF, 457 KB
english, 2006