Effect of the Surface Bond States in as-Deposited DLC Films...

IEEE Transactions on Plasma Science 2012 / 08 Vol. 40; Iss. 8

Effect of the Surface Bond States in as-Deposited DLC Films on the Incorporation of Nitrogen and Oxygen Atoms

Nitta, Yuki, Okamoto, Keishi, Nakatani, Tatsuyuki, Shinohara, Masanori
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Volume:
40
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2012.2203613
Date:
August, 2012
File:
PDF, 313 KB
english, 2012
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