Generation of Charged Nanoparticles and Their Deposition...

The Journal of Physical Chemistry C 2012 / 11 Vol. 116; Iss. 47

Generation of Charged Nanoparticles and Their Deposition Behavior under Alternating Electric Bias during Chemical Vapor Deposition of Silicon

Youn, Woong-Kyu, Kim, Chan-Soo, Lee, Jae-Young, Lee, Sung-Soo, Hwang, Nong-Moon
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Volume:
116
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp310705p
Date:
November, 2012
File:
PDF, 2.04 MB
english, 2012
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