A Specially Designed PLC-Based High-Voltage Pulse Modulator...

IEEE Transactions on Plasma Science 2010 / 11 Vol. 38; Iss. 11

A Specially Designed PLC-Based High-Voltage Pulse Modulator for Plasma Immersion Ion Implantation

Zhu, Zongtao, Gong, Chunzhi, Wang, Zhijian, Tian, Xiubo, Li, Yi, Yang, Shiqin, Fu, Ricky K. Y., Chu, Paul K.
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Volume:
38
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2010.2051166
Date:
November, 2010
File:
PDF, 693 KB
english, 2010
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