Improvement of the performance of the PECVD SiO2/Si3N4...

IEEE Transactions on Dielectrics and Electrical Insulation 2011 Vol. 18; Iss. 2

Improvement of the performance of the PECVD SiO2/Si3N4 double-layer electrets

Jinwen Zhang, Xudong Zou, Yaping Zhang
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Volume:
18
Year:
2011
Language:
english
DOI:
10.1109/tdei.2011.5739449
File:
PDF, 684 KB
english, 2011
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