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Improvement of Film-to-Substrate Adhesion for Diamond and Related Films by Plasma-Based Technologies
Ma, Lei, Yu, Xiang, Peng, Zhijian, Fu, Zhiqiang, Yue, Wen, Wang, Chengbiao, Hua, MengVolume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2160461
Date:
November, 2011
File:
PDF, 959 KB
english, 2011