Plasma Immersion Ion Implantation Into Inner Surface of...

IEEE Transactions on Plasma Science 2011 / 11 Vol. 39; Iss. 11

Plasma Immersion Ion Implantation Into Inner Surface of Cylindrical Bore Using Moving Auxiliary Electrode

Wang, Peng, Tian, Xiubo, Gong, Chunzhi, Yang, Shiqin, Chu, Paul K.
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Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2162751
Date:
November, 2011
File:
PDF, 527 KB
english, 2011
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