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Investigation of Plasma Immersion Ion Implantation Process in Magnetic Mirror Geometry
Pillaca, Elver Juan de Dios Mitma, Ueda, Mario, Kostov, Konstantin GeorgievVolume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2160209
Date:
November, 2011
File:
PDF, 373 KB
english, 2011